 1 LTCC N2 MFC and absolute pressure transducer |
 2 C4F10 Supply tank scale |
 3 _LTCC C4F10 Supply |
 4 LTCC distillation unit scale |
 5 LTCC distillation temperature display |
 6 01_LTCC C4F10 distillation tank |
1 LTCC N2 MFC and absolute pressure transducer |
2 C4F10 Supply tank scale |
3 _LTCC C4F10 Supply |
4 LTCC distillation unit scale |
5 LTCC distillation temperature display |
6 01_LTCC C4F10 distillation tank |
